IXZ-500 Integrated Dual-Axis Gyroscope


InvenSense Integrated Dual-Axis Gyroscope

The IXZ™ family of dual-axis MEMS gyroscopes feature the world’s first pitch/yaw (X and Z-axis) MEMS gyros that meet the in-plane mounting requirements of remote controls and interactive game controllers for digital TVs, IPTVs, set top boxes, media centers and PCs. Traditionally, designers of remote controls have had to use two single Z-axis or one dual-axis X/Y gyroscope,  which because of their axes of sensitivity, required a daughter card for mounting the angular rate sensors perpendicular to the rest of the system electronics.  The in-plane mounting of the IXZ family overcomes this limitation, enabling compelling form-factor designs.  

The IXZ-500 is uniquely suited for motion-controlled menu-navigation applications.  The device features a primary output with a ±500°/sec full scale range, for measuring higher speed motions, and has a secondary output with a ±110°/sec full-scale range, for sensing more precise movements.  These dual outputs allow the system designer to use an analog-to-digital-converter (ADC) with two fewer bits, saving overall system cost.

The IXZ-500 leverages InvenSense’s patented and volume-proven Nasiri-Fabrication platform, which integrates MEMS wafers with companion CMOS electronics through wafer-level bonding to produce a functionally complete, low-cost motion sensor.  All required conditioning electronics are integrated into a single chip measuring 4x5x1.2mm.  It incorporates X- and Z-axis low-pass filters and an EEPROM for on-chip factory calibration of the sensor.  Factory trimmed scale factors eliminate the need for external active components and end-user calibration.  A built-in Proportional-To-Absolute-Temperature (PTAT) sensor provides temperature compensation information.  The product is RoHS and Green Compliant.

The device leverages InvenSense’s patented and proprietary Nasiri-Fabrication design and manufacturing platform, where the MEMS and CMOS control electronics are bonded and hermetically sealed, allowing direct electrical interconnections and testing at the wafer level.  This approach minimizes parasitic capacitance and improves signal-to-noise ratios versus competitive solutions.


  • 3D Remote Controls
  • 3D Mice


  • Integrated X- and Z-axis gyros on a single chip with in-plane mounting
  • Two separate outputs per axis for higher speed motions and lower-speed precise movements:
    • 500°/s full scale range (higher speed)
    • 110°/s full scale range (high precision)
  • Integrated amplifiers and low-pass filters
  • Auto Zero function for bias calibration
  • On-chip temperature sensor
  • High vibration rejection over a wide frequency range
  • High cross-axis isolation by proprietary MEMS design
  • 3V single supply operation
  • Hermetically sealed for temp and humidity resistance
  • 10,000 g shock tolerant
  • Smallest dual axis gyro package at 4 x 5 x 1.2mm
  • RoHS and Green Compliant


  •  World’s smallest dual-axis gyro sensor
  •  Highest dynamic range to measure fast-action motion
  •  Integrated electronics for complete signal conditioning
  •  Lowest cross-axis sensitivity for best signal accuracy
  •  Hermeticity for high temperature & humidity resistance
  •  Most robust design for high impact consumer electronics
  •  Compatible with standard SMT assembly processes
Part # Full Scale Range (FSR) Secondary Output (FSR) Sensitivity Sensitivity Secondary Output Output Operating Voltage Supply Package Size PDF Documentation Evaluation Board (EVB) Purchase
UNITS: (°/sec) (°/sec) (mV/°/sec) (mV/°/sec) (V) (mm) (.pdf) (add to cart) (add to cart)

±500 ±110 2.0 9.1 Analog 3.0 ±10% 4x5x1.2

  • Disclaimer

    • InvenSense sensors should not be used or sold in the development, storing, production and utilization of any conventional or mass-destructive weapons or any other weapons or life-threatening applications as well as in any other life-critical applications including but not limited to medical equipment, transportation, aerospace and nuclear instruments, undersea equipment, power plant equipment, disaster prevention and crime prevention equipment. In devices or systems whereby malfunction of these products can be expected to result in personal injury and casualties, InvenSense customers using or selling these products do so at their own risk and agree to keep InvenSense harmless from any consequences. InvenSense reserves the right to make changes to this product, including its circuits and software, in order to improve its design and/or performance, without prior notice. InvenSense makes no warranty, either expressed or implied with respect to any product, and specifically disclaims all other warranties, including warranties for merchantability, non-infringement, and fitness for any particular purpose. For more information go to Terms and Conditions.
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