MEMS Gyroscope Technology

Our technology is comprised of four proprietary components: our patented Nasiri-Fabrication process, our advanced MEMS gyroscope design, our mixed-signal circuitry that provides sensor signal processing and enables SensorFusion technology critical to our MotionProcessing platform, and our MotionProcessing library and MotionApplication software solutions. Our Nasiri-Fabrication process allows us to combine MEMS with standard complementary metal oxide semiconductor (CMOS) at the wafer level, resulting in significant performance, reliability, integration and cost benefits that differentiate our solutions. Our technology allows us to offer products for consumer electronics applications that span increasing levels of integration, from single-axis analog gyroscopes to fully-integrated, intelligent three- and six-axis digital MotionProcessing solutions.

Highly integrated and cost effective solutions enabled by our patented Nasiri-Fabrication process.

The foundation of our MotionProcessing solution is our patented Nasiri-Fabrication process, which combines MEMS on CMOS (also known as CMOS-MEMS) in a small, cost effective standard package. Combining a MEMS wafer with an industry standard CMOS wafer allows us to reduce the number of MEMS manufacturing steps, perform wafer-level testing, and use chip-scale packaging, thereby reducing back-end costs of packaging and testing and improving overall yield. In addition to our CMOS-MEMS process, we have developed low cost, high throughput proprietary calibration systems for our motion sensors, which further reduces back-end costs. We believe we have pioneered a technological breakthrough in manufacturing low-cost MEMS motion processing solutions. Combining this unique process capability with our MEMS-based motion sensor designs and methodologies, mixed-signal IC integration techniques, MotionProcessing library and MotionApplication software, we are able to introduce our MotionProcessing solutions with industry-leading form factor, performance, cost-effectiveness, reliability and integration.

Manufacturing efficiency, flexibility and scalability.

Most MEMS devices are manufactured in proprietary facilities utilizing numerous fabrication steps, esoteric substrates and MEMS-specific manufacturing processes that are not compatible with CMOS manufacturing processes. The Nasiri-Fabrication method of combining MEMS on CMOS allows us to utilize a fabless model without needing specialty foundries. Our fabless model enables cost-effective high volume production and provides us with flexibility to quickly react to our customers’ needs. Additionally, our ability to do wafer-level testing combined with our close collaborative relationships with third party foundries enables us to better control the manufacturing process, lower cost per axis and improve device performance.

Scalable MotionProcessing platform with opportunities for multi-sensor integration.

Our current generation of MotionProcessing solutions have an embedded three-axis gyroscope and are able to take input from external three-axis accelerometers to provide a complete six-axis measurement of motion. Our Nasiri-Fabrication process enables the integration of multiple motion sensors, such as a gyroscope and an accelerometer, delivering improved performance, enhanced reliability, smaller form factor and lower cost. Our MotionProcessing platform also incorporates software application programming interfaces provided by our proprietary MotionProcessing library enabling faster time-to-market for our customers. As a result of integrating multiple sensors, our products do not require the traditional calibration steps required with discrete solutions and offload the intensive motion processing computation requirements from the host processor to our chip, which we believe will drive the creation of entirely new capabilities for consumer devices, applications and services.

High performance and reliability.

Consumer devices are exposed to harsh environmental conditions and must meet increasing performance and reliability requirements. One of the primary requirements for MEMS sensors in consumer applications is the ability to detect and measure all types of motion at varying rates of rotation and in a range of environmental conditions. Gyroscopes, in particular, are responsible for the measurement of rotational motion, hence their functionality over the life of the product is critical. Nasiri-Fabrication combines the MEMS with CMOS at the wafer level, providing highly reliable hermetically sealed cavities for the MEMS sensor without the need for a costly getter process, whereby reactive materials are applied to remove trace gasses and create a vacuum. The hermetic seal allows for reliable operation under harsh environmental conditions over typical consumer product lifecycles. The use of thick bulk silicon in our MEMS gyroscope fabrication reduces sensitivity to interference from environmental sounds and vibrations, enabling higher performance and accuracy. Polysilicon MEMS structures are physically thinner than bulk silicon, which exposes the device to interference from external noise sources such as sound, music, vibrations or a phone ring. As a result, our solutions enable a motion-based user interface that has greater tolerance to environmental factors.

The Leader in Consumer Motion Processing Solutions